Auger Electron Spectroscopy (AES or Auger) is a chemical surface analysis method. AES measures the chemical composition of the outermost 100 Å of a sample. Measurements can be made at greater depths by ion sputter etching to remove surface layers. All elements except for H and He can be detected at concentrations above 0.1 to 1.0 atom %, depending on the element. In addition, elemental concentration versus depth (up to 2 µm) information can be obtained by ion sputter etching while monitoring every element of interest. Only conductive samples can be measured with this technique. The sampled area varies from 1 mm down to 2 µm in diameter.

Nickel oxide prevents bonding/soldering and good electrical contact.

Polymer film thickness determined by Auger sputter depth profile.
Aluminum Oxide detected at the interface.

Properly passivated stainless steel surface, i.e. Cr-oxide
rich surface.