Energy Dispersive Spectroscopy (EDS) is used in conjunction with the Scanning Electron Microscope (SEM) providing chemical analysis in areas as small as 1 µm in diameter. EDS detects all elements except for H, He, Li, and Be. EDS can be performed exactly on any features or particles seen in the SEM images and can “MAP” elements on a surface. Unknown materials can be identified and quantitative analysis can be performed.

Indium oxide identified

Drywall dust contamination

Chlorine is the culprit in stainless steel rust

Varied oxidation on MEMS device