SEMATECH and SEMI Standard Analyses

Rocky Mountain Laboratories, Inc. provides analyses that conform to the following SEMATECH and SEMI Standards for testing of passivated 316L stainless steel components being considered for installation into a high-purity gas distribution system:

SEMASPEC #90120401B-STD (SEM Analysis)
SEMASPEC #90120402B-STD (EDS Analysis)
SEMASPEC #90120403B-STD (XPS Analysis)
SEMASPEC #91060573B-STD (Auger (AES) Analysis)

and

SEMI F60-0306 (based on F60-0301) (XPS Analysis)
SEMI F72-1102 (Auger (AES) Analysis)

Please contact us if you have any questions or would like to submit samples for analysis. We can be reached at 1-800-PRO-LABS (776-5227).