Scanning probe microscopy (SPM) refers to a family of measurement techniques that utilize a scanning probe. The most common measurement is Atomic Force Microscopy (AFM), which measures surface topography. Imaged areas can be from the nm scale to as large as 100 µm X 100 µm. Heights and depths of features can be measured and many surface roughness parameters, e.g Ra, can be calculated. 3-D images can also be produced for dramatic data presentation. Magnetic and electrical response can also be measured with SPM.

    Polymer coating
    on medical device

      Membrane

          Polysilicon

   Surface roughness
   on glass substrate

  Magnetic Force Microscope
   (MFM) Image of Hard Disk

   AFM Phase Image of
   Obliquely Deposited SiO₂
   Published Here