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Auger Electron Spectroscopy (AES)
Auger Electron Spectroscopy (AES or Auger) is a chemical surface analysis method.
AES measures the chemical composition of the outermost 100 Å of a sample. Measurements can be made at
greater depths by ion sputter etching to remove surface layers. All elements except for H and He can be detected
at concentrations above 0.1 to 1.0 atom %, depending on the element. In addition, elemental concentration versus
depth (up to 2 µm) information can be obtained by ion sputter etching while monitoring every element of interest.
Only conductive samples can be measured with this technique. The sampled area varies from 1 mm
down to 2 µm in diameter.
Nickel oxide prevents bonding/soldering and good electrical contact.
Polymer film thickness determined by Auger sputter depth profile.
Aluminum Oxide detected at interface.
Properly passivated stainless steel surface, i.e. Cr-oxide rich surface.
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