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Scanning Probe Microscopy/Atomic Force Microscopy (SPM/AFM)
Scanning probe microscopy (SPM) refers to a family of measurement
techniques that utilize a scanning probe. The most common measurement is Atomic Force Microscopy (AFM),
which measures surface topography. Imaged areas can be from the nm scale to as large as 100 µm X 100 µm.
Heights and depths of features can be measured and many surface roughness parameters, e.g Ra, can be calculated.
3-D images can also be produced for dramatic data presentation. Magnetic and electrical response can also be
measured with SPM.
Polymer coating
on medical device
Membrane
Polysilicon
Surface roughness
on glass substrate
Magnetic Force Microscope
(MFM) Image of Hard Disk
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