Sematech Analysis and SEMI Standards Analysis

Rocky Mountain Laboratories, Inc. provides SEMI Standards analyses that conform to the following SEMATECH and SEMI Standards for testing of passivated 316L stainless steel components being considered for installation into a high-purity gas distribution system:

  • SEMASPEC #90120401B-STD (SEM Analysis)
  • SEMASPEC #90120402B-STD (EDS Analysis)
  • SEMASPEC #90120403B-STD (XPS Analysis)
  • SEMASPEC #91060573B-STD (Auger (AES) Analysis)
  • SEMI F60-0306 (based on F60-0301) (XPS Analysis)
  • SEMI F72-1102 (Auger (AES) Analysis)